To support this skepticism, the scientific literature is indeed filled with poorly fitted spectra and, therefore, incorrectly interpreted XPS data. Hence, it is impossible to derive accurate chemical and, most important, quantitative information based on curve fitting results. This skepticism is mainly caused by the impression that any spectrum can be fitted with infinite combinations of peaks of different widths and shapes with the same goodness of fit. Most specialists working with XPS data experienced skepticism while introducing results of XPS curve fits to their colleagues from the non-surface analysis community. Both novices and experts will agree that curve-fitting spectra is one of the most challenging components of performing XPS analysis. One of the main objectives of the curve fitting of XPS data is to extract chemical information about the sample being examined.
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